IsoValley
IsoValley






| 청정도등급 | ≥ 0.1 ㎛ | ≥ 0.2 ㎛ | ≥ 0.3 ㎛ | ≥ 0.5 ㎛ | ≥ 1.0 ㎛ | ≥ 5.0 ㎛ | |
|---|---|---|---|---|---|---|---|
| Particles / m³ (ISO 14644-1) |
ISO Class 1 | 10 | - | - | - | - | - |
| ISO Class 2 | 100 | 24 | 10 | - | - | - | |
| ISO Class 3 | 1,000 | 237 | 102 | 35 | - | - | |
| ISO Class 4 | 10,000 | 2,370 | 1,020 | 352 | 83 | - | |
| ISO Class 5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | - | |
| ISO Class 6 | 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 | 293 | |
| ISO Class 7 | - | - | - | 352,000 | 83,200 | 2,930 | |
| ISO Class 8 | - | - | - | 3,520,000 | 832,000 | 29,300 | |
| ISO Class 9 | - | - | - | 35,200,000 | 8,320,000 | 293,000 | |

| 청정실면적(m²) | 최소 샘플링 위치 개수![]() |
|---|---|
| 2 | 1 |
| 4 | 2 |
| 6 | 3 |
| 8 | 4 |
| 10 | 5 |
| 24 | 6 |
| 28 | 7 |
| 32 | 8 |
| 36 | 9 |
| 52 | 10 |
| 56 | 11 |
| 64 | 12 |
| 68 | 13 |
| 72 | 14 |
| 76 | 15 |
| 104 | 16 |
| 108 | 17 |
| 116 | 18 |
| 148 | 19 |
| 156 | 20 |
| 192 | 21 |
| 232 | 22 |
| 276 | 23 |
| 352 | 24 |
| 436 | 25 |
| 636 | 26 |
| 1000 | 27 |
| >1000 | 식(A.1) 참조) |