IsoValley
IsoValley
청정도등급 | ≥ 0.1 ㎛ | ≥ 0.2 ㎛ | ≥ 0.3 ㎛ | ≥ 0.5 ㎛ | ≥ 1.0 ㎛ | ≥ 5.0 ㎛ | |
---|---|---|---|---|---|---|---|
Particles / m³ (ISO 14644-1) |
ISO Class 1 | 10 | - | - | - | - | - |
ISO Class 2 | 100 | 24 | 10 | - | - | - | |
ISO Class 3 | 1,000 | 237 | 102 | 35 | - | - | |
ISO Class 4 | 10,000 | 2,370 | 1,020 | 352 | 83 | - | |
ISO Class 5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | - | |
ISO Class 6 | 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 | 293 | |
ISO Class 7 | - | - | - | 352,000 | 83,200 | 2,930 | |
ISO Class 8 | - | - | - | 3,520,000 | 832,000 | 29,300 | |
ISO Class 9 | - | - | - | 35,200,000 | 8,320,000 | 293,000 |
청정실면적(m²) | 최소 샘플링 위치 개수 |
---|---|
2 | 1 |
4 | 2 |
6 | 3 |
8 | 4 |
10 | 5 |
24 | 6 |
28 | 7 |
32 | 8 |
36 | 9 |
52 | 10 |
56 | 11 |
64 | 12 |
68 | 13 |
72 | 14 |
76 | 15 |
104 | 16 |
108 | 17 |
116 | 18 |
148 | 19 |
156 | 20 |
192 | 21 |
232 | 22 |
276 | 23 |
352 | 24 |
436 | 25 |
636 | 26 |
1000 | 27 |
>1000 | 식(A.1) 참조) |